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<ul id="qqie6"></ul> 當前位置：深圳市萬德泉科技有限公司>>inficon薄膜沉積控制產品（晶控儀）>> Crystal 12 探頭
inficon IC/5、XTC2等薄膜沉積控制產品維修或替換
Maxtek MDC-360/360C薄膜沉積控制儀維修或替換
自動晶體轉換功能大限度延長生產時間
INFICON Crystal 12 傳感器與INFICON IC6 薄膜沉積控制器結合使用時，可自動更換其晶體，而無需中斷過程。晶體不穩定或失效時，IC6 會立即向 Crystal 12傳感器旋轉傳送帶發送信號，要求其立即將新晶體旋轉到位，從而實現持續沉積速率監控。為進一步小化停工時間，可以將晶體預先加載到另一個可選旋轉傳送帶上，這樣，可以直接輕松快速地更換裝有失效晶體的旋轉傳送帶，從而大限度縮短系統打開的時間。
| 類型 | Crystal 12 Sensor | |
|---|---|---|
| 無水時的烘烤溫度 | 130°C | |
| 小水流時的工作等溫環境溫度 | 300° C | |
| 尺寸（大外殼） | 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed | |
| 水管和空氣管長度 | Standard 30 in. (762 mm) | |
| 晶體交換 | Front-loading | |
| 安裝 | Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1). | |
| 重量 | 4.92 lb. (2.23 kg) | |
| 安裝要求 | ||
| 饋入件 | Qty (1) 2-3/4 in. ConFlat? with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1, or, Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings or, Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1 | |
| 安裝 | User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose. | |
| 空氣和水連接 | User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.) | |
| 實用工具 | Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve. | |
| 材料 | ||
| 板、材料罩、機械部件、主體和圓盤 | 304 type stainless steel | |
| 彈簧、電氣觸點 | Au plated Be-Cu, Au Plated 302 stainless steel | |
| 水管和空氣管 | S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing | |
| 連接器 | Stainless steel | |
| 絕緣體 | Teflon, Peek? | |
| 電纜 | Teflon insulated copper plated steel | |
| 晶體 | 0.550 in. (13.97 mm) diameter | |
| 1 in. 螺栓和 Ultra-Torr（壓縮接頭）端接： | ||
| 材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON? | |
| 溫度 | Operational environment to 300° C with water cooling or 165° C without | |
| 安裝 | 1.015 in. ±0.010 in. diameter aperture | |
| CF 40 焊接式端接： | ||
| 材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel | |
| 溫度 | Operational environment to 450° C with water cooling or 165° C without | |
| 安裝 | Mates with 2 ? in. ConFlat type flanges with 1.375 in. I.D. min. | |
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