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Maxtek MDC-360/360C薄膜沉積控制儀維修或替換
INFICON 濺射傳感器專為各種濺射過程而設計。鍍金鈹銅傳感器體和冷卻管在濺射環境中可實現冷卻效果。傳感器頭內置的磁鐵可抑制因外部磁場偏轉濺射系統中的高能自由電子而引起的過熱。后裝式晶體支架設計便于更換晶體,更換時無需從系統中拆卸傳感器頭。
Sputtering Sensor | |
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零件號 | 明細 |
750-618-G1 | 濺射傳感器(僅傳感器,不包括饋入件) |
類型 | Sputtering Sensor | |
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無水時的烘烤溫度 | 105°C | |
小水流時的工作等溫環境溫度 | 400° C | |
尺寸(大外殼) | 1.36 in. OD x 0.69 in. high (3.45 cm x 1.75 cm) | |
水、空氣和同軸長度 | Standard 30 in. (76.2 cm) | |
晶體交換 | Rear-loading | |
安裝 | Customer supplied | |
安裝要求 | ||
饋入件 | 2 pass water with coax connector 2? in. ConFlat? Flange – IPN 002-043 1 in. Bolt – IPN 002-042 | |
其他 | 1) Customer to provide vacuum-tight braze joints or connectors for the water tubes. 2) XIU or Oscillator designed to interface with the specific deposition controller. | |
水流速 | Minimum water flow 750 cc/min, 30° C max (Do not allow to freeze) Coolant should not contain chlorides as stress corrosion cracking may occur. If the water tube passes through a cryoshroud, drain the tubes if the water flow is stopped for any reason. | |
材料 | ||
主體和支架 | Au plated Be-Cu | |
彈簧、電氣觸點 | Au plated Be-Cu | |
水管 | Au plated Be-Cu, 0.125 in. (0.32 cm) O.D. | |
連接器 | 304 Stainless steel | |
絕緣體 | 99% Al2O3 | |
電線 | Teflon? insulated copper | |
焊料 | Cadmium free silver and indium alloys | |
晶體 | 0.550 in. (1.4 cm) Diameter | |
磁鐵 | ALNICO 5 Alloy | |
可選閘門組件 750-005-G1 規格: | ||
溫度 | 130° C | |
1 in. 螺栓和 Ultra-Torr(壓縮接頭)端接: | ||
材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON? | |
溫度 | Operational environment to 300oC with water cooling or 165oC without | |
安裝 | 1.015 in. ±0.010 in. diameter aperture | |
CF 40 焊接式端接: | ||
材料 | 304 stainless steel, Teflon, ceramic, beryllium nickel | |
溫度 | Operational environment to 450oC with water cooling or 165oC without | |
安裝 | Mates with 2 ? in. ConFlat type flanges with 1.375 in. I.D. min. |
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