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<ul id="qqie6"></ul> 當前位置：深圳市萬德泉科技有限公司>>inficon薄膜沉積控制產(chǎn)品（晶控儀）>> UHV 可烘烤探頭
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inficon IC/5、XTC2等薄膜沉積控制產(chǎn)品維修或替換
Maxtek MDC-360/360C薄膜沉積控制儀維修或替換
INFICON UHV 可烘烤晶體傳感器擁有經(jīng)實踐檢驗的可靠性和耐用性，提供超越當前市場上的任何傳感器頭的熱穩(wěn)定性。可烘烤傳感器由 304 號不銹鋼、鉬、鉻鎳鐵合金、鎳和氧化鋁材料制成，設計為可承受連續(xù)烘烤溫度高達 450° C（僅適用于烘烤，實際沉積監(jiān)控需要水流）。前裝式設計允許在側面插入空間不足的應用中輕松插入晶體支架。
| 類型 | Bakeable Sensor w/ Shutter | Bakeable Sensor w/out Shutter | |
|---|---|---|---|
| 溫度 | 400° C continuous (for bake only; water flow recommended for actual deposition monitoring) | 450°C continuous (for bake only; water flow recommended for actual deposition monitoring) | |
| 傳感器頭部尺寸（大外殼） | 1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high | 1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high) | |
| 晶體交換 | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange. | Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. | |
| 安裝 | a) Standard—four #4-40 tapped holes on the back of the body b) Optional—right angle bracket; IPN 007-108 | Four #4-40 tapped holes on the back of the body | |
| 饋入件 | 2? in. ConFlat?, integral with sensor head Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius) | 2? in. ConFlat, integral with sensor head Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius) | |
| 實用工具 | 1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ? in. water tubes during bakeout.) 2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa] 3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required | Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ? in. water tubes during bakeout.) | |
| 材料 | |||
| 主體和支架 | 304 type stainless steel | 304 type stainless steel | |
| 彈簧 | Molybdenum and Inconel X-750 | Molybdenum and Inconel X-750 | |
| 水、空氣和同軸管線 | 0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax | ||
| 其他機械部件 | 18-8 or 304 stainless | 18-8 or 304 stainless | |
| 絕緣體 | >99% Al2O3 in vacuum; other high density ceramics used elsewhere | >99% Al2O3 in vacuum; other high density ceramics used elsewhere | |
| 電線 | 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) | 1) Ni (in vacuum) 2) Ni plated Cu (elsewhere) | |
| 銅焊 | Vacuum process high temperature Ni-Cr alloy | Vacuum process high temperature Ni-Cr alloy | |
| 晶體 | 0.550 in. (13.97 mm) diameter | 0.550 in. (13.97 mm) diamete | |
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