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DSDX452 DX111

DSDX452 DX111

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DSDX452 DX111

SEREN I1600 ICP Generator

AMAT 0041-05383 200mm Zone 5 Profiler Peek

vacuum chamber Flange, Cryo Turbo, Gate valve interface

ICS advent Data Acquisition computer 8535-TC-03,19-1?379

Opto 22 DA4T 1 box of 23  digital-analog converter m

2 AMAT 0010-40099 Erhorn RF match network price for bot

Two AMAT 0020-37210 Loadlock Casset Holder

Novellus / Porter TDEAT Flow control assembly 020495640

ENI Polara-260 Bipolar Pulsed Supply 0190-01428

2 Stec MFC SEC-4400MC, N2 200 SCCM, with calibration sh

2 Stec MFC SEC-4400MC, Ar 500 SCCM, with calibration sh

5 Edwards high vacuum INT, APG-M-NW25 ST/ST active pira

ISIOC RF HCM PVD-PVD RACK NOVELLUS 02-124572-00 REV. 1

ISIOC HCM APVD NOVELLUS 02-276954-00 REV. 1

ISIOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV.A

SIOC WTS-HV SIOC 0 NOVELLUS 02-123962-00 REV. A

Lot of 2 Novellus 02-140949-00 REV C, Main system start

Lot of 2 MDC LAV-250-PAA 1MC, Vacuum Isolation valves,

AMAT 0200-10814 125 mm Pedestal

AMAT 0010-30091 HV MODULE ESC, 5200 Centura Module assy

Novellus 60-112545-00, Toggle Valve, Manf, HDP 300

5 STEC MFC SEC-4400M C3F6, WF6, SiH4,

3 Takex Wide Sensors SS20-TR40, Input 12-24V DC, 150mA.

VME MOTOROLA 2304-900

LAM 853-015130-103 RF Match,

3 Horiba stec MFC LF-410A, LF-410A-EVD, TEOS, 4.0 g/min

4 Unit 8560 series UFC-8561C H2 HCL, AMAT 3030-12306

Kensington lab, 77-4000-0108-00 Robot axis multilink Z,

CANON Litho tool BG3-2526-000 EX4 ND filter, 101-061208

Novellus A01-132-01 Water cooled chamber, Gasonic A01-1

ASTeX D13604 Wave Guide with 2.5 Ghz Coupling, AMAT HDP

AMAT 0240-70903 Centura 9298 basic indexter, Non ENP, L

5 1381-658459-12 connector PCB, 648180

AMAT 0150-1000 Kaiser systems inc power supply S1-1-100

Novellus 01-17005-00 Controller MPU 9100

AMAT 0100-38027 Seriplex I/O distribution board

AMAT 0190-20048 Synergy v21 PCB Board

SVG 99-80207-02 SPIN STATION EXPANSION BOARD, REV A

Tylan general AC-2 Adaptorr model AC213C REV A millipor

Novellus 60-313773-00, SMC XTG 310-30-1A-X2 rectangular

Novellus 27-057877-00 Computer Display LCD, Duraflo

AMAT 0190-13407 AE PDX RF Generator 500W, 325-375 KHz

 Brooks 001-5526-01 PCB, main controller, MT VT5, MC

 Novellus 90-2728 Bottom Board, handler, PCA

Novellus 60-277428-00 Manifold assembly with 22 MAC sol

ASYST 3200-1044-01, control board with daughter board 3

4  Norcal product AMAT 3870-01244, Isolation valve K

 Brooks 5965S MFC, O2 gas, 30 SLM range, novellus 22

RECIF ANF Automatic Wafer Notch Finder

2 STEC Horiba MFC LF-A40M-A-EVD, Liquid: TEOS, Flow Rat

Lot of 2 Brooks 5866RT MFC 300sccm He, Novellus 22-0458

3 STEC LF-410A-EVD,1 TEB, 1.5 g/min and 2 TEOS 1.5 g/mi

3 STEC LF-310A-EVD,TEP?O, 0.25g/min liquid flow controll

STEC LF-410A-EVD,TEO?S, 1.5g/min liquid flow controller

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DSDX452 DX111