mks真空計627B01TBC1B半導體CVD濺射鍍膜電源深圳市天鉉真空技術有限公司供應美國真空計流量計真空泵分子泵激光器

INFICON 皮拉尼PSG500、PSG502-S、PSG510-S 和 PSG512-S型標準真空計采用當今市場上的數字皮拉尼技術。不銹鋼傳感器單元堅固耐用，結構設計緊湊，適用于半導體系統和標準應用，例如前級真空管。

益處

輕松一鍵調節 ATM 和 HV
節省空間的堅固設計
鋁質殼體
可在任意方向安裝
不銹鋼測量單元，帶金屬密封饋入裝置
便于集成的對數信號輸出
螺紋接頭，具有 10 巴過壓能力
250 °C 烘烤型
在腐蝕應用中可選購鎳絲
陶瓷饋入裝置，適用于腐蝕性的應用 (PSG510 & PSG512)
可選設定點
RoHS 合規

典型應用

高真空電離真空計控制
前級真空壓力監控
真空系統中的安全電路
高真空和低真空范圍內的一般真空測量和控制

類型

PSG500 tungsten	PSG500-S tungsten, setpoints	PSG502-S nickel, setpoints	PSG510-S tungsten, setpoints, ceramic feedthroughs	PSG512-S nickel, setpoints, ceramic feedthroughs
測量原則		thermal conductance according to Pirani	thermal conductance according to Pirani	thermal conductance according to Pirani	thermal conductance according to Pirani	thermal conductance according to Pirani
精度 (N2)
1 x 10-3… 100 毫巴	% of reading	±15%	±15%	±15%	±15%	±15%
5 x 10-4… 1 x 10-3 毫巴	% of reading	±50%	±50%	±50%	±50%	±50%
100 … 1000 毫巴	% of reading	±50%	±50%	±50%	±50%	±50%
可重復性（空氣）
1 x 10-3… 100 毫巴	% of reading	2%	2%	2%	2%	2%
輸出信號（測量信號）
電壓范圍	V	0 … +10.3	0 … +10.3	0 … +10.3	0 … +10.3	0 … +10.3
測量范圍	V	+1.9 … +10.0	+1.9 … +10.0	+1.9 … +10.0	+1.9 … +10.0	+1.9 … +10.0
測量范圍（空氣、O2、CO、N2）	mbar	5 x 10-4 to 1000	5 x 10-4 to 1000	5 x 10-4 to 1000	5 x 10-4 to 1000	5 x 10-4 to 1000
設定點
設定點數量			2	2	2	2
設置范圍	mbar	?	2 x 10-3 … 500	2 x 10-3 … 500	2 x 10-3 … 500	2 x 10-3 … 500
滯后	% of reading	?	10% above lower threshold	10% above lower threshold	10% above lower threshold	10% above lower threshold
繼電器觸點	V (dc) A (dc)	?	30	30	30	30
繼電器觸點：轉換時間	ms	?	<20	<20	<20	<20
電源電壓
真空計上	V (dc)	+14 …+30	+14 …+30	+14 …+30	+14 …+30	+14 …+30
波紋	V (p-p)	≤1	≤1	≤1	≤1	≤1
電壓與壓強		logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade	logarithmic 1.286 Volts per decade
內部容積
DN 16 ISO-KF，DN 16 CF-R，7/16-20 UNF	cm3 (in.3)	1.5 (0.092)	1.5 (0.092)	1.5 (0.092)	1.5 (0.092)	1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R 長管	cm3 (in.3)	10 (0.61)	10 (0.61)	10 (0.61)	10 (0.61)	10 (0.61)
1/8'' NPT，4 VCR，8 VCR，1/2'' 管	cm3 (in.3)	2 (0.122)	2 (0.122)	2 (0.122)	2 (0.122)	2 (0.122)
容許溫度
運行	°C	+5 … +60	+5 … +60	+5 … +60	+5 … +60	+5 … +60
真空連接 (1)	°C	80 / 250 (2)	80 / 250 (2)	80 / 250 (2)	80 / 250 (2)	80 / 250 (2)
貯存	°C	-20 … +65	-20 … +65	-20 … +65	-20 … +65	-20 … +65
重量
DN 16 ISO-KF，7/16-20 UNF	g	80	80	80	80	80
DN 16 CF-R，4 VCR	g	100	100	100	100	100
1/8'' NPT，1/2'' 管	g	70	70	70	70	70
8 VCR，DN 16 ISO-KF 長管	g	130	130	130	130	130
DN 16 CF-R 長管	g	140	140	140	140	140
錯誤信號	V	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)	0 … +0.5 (filament rupture)
輸出電阻	?	2 x 4.7	2 x 4.7	2 x 4.7	2 x 4.7	2 x 4.7
*小負載電阻	k?	10, short-circuit proof	10, short-circuit proof	10, short-circuit proof	10, short-circuit proof	10, short-circuit proof
反應時間	ms	80	80	80	80	80
真空計識別	k?	27.0, referenced to supply common	27.0, referenced to supply common	27.0, referenced to supply common	27.0, referenced to supply common	27.0, referenced to supply common
調整		one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment	one tactile switch for ATM and HV adjustment
電流消耗	mA	<500 (max. starting current)	<500 (max. starting current)	<500 (max. starting current)	<500 (max. starting current)	<500 (max. starting current)
功耗	W	≤1	≤1	≤1	≤1	≤1
電氣連接		FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male	FCC 68 / RJ45 appliance connector, 8 poles, male
傳感器電纜		8 poles plus shielding	8 poles plus shielding	8 poles plus shielding	8 poles plus shielding	8 poles plus shielding
電纜長度	m	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)	≤100 (8 x 0.14 mm2)
暴露于真空的材料		glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435	glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435	glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435	AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435	AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435
單絲		W	W	Ni	W	Ni
容許壓力	bar (absolute)	10, limited to inert gases	10, limited to inert gases	10, limited to inert gases	10, limited to inert gases	10, limited to inert gases
安裝定位		any	any	any	any	any
保護等級		IP40	IP40	IP40	IP40	IP40