線性納米定位器SLC-24系列是高精度納米線性定位器,具有SLC-2430,SLC-2445,SLC-2460,SLC-2475,SLC-2490,SLC-24105,SLC-24120,SLC-24150,SLC-24180型號各種寬度和高度,非常適合微納定位系統(tǒng)使用,具有可靠的穩(wěn)定性和*的定位精度。這些線性定位器還具有非磁性材料類型,能夠兼容10^-11mbar真空環(huán)境。
線性納米定位器SLC-24系列具有緊湊的結構和微小的外形尺寸,可以植入位置傳感器從而更好地勝任微納定位任務.
線性納米定位器SLC-24系列產品都能達到
blocking force FB > 3.5 N, 力FN~30 N,Lift force FL>11.5N,速度達到20mm/s。線性納米定位器SLC-24系列規(guī)格參數| 型號 | SLC-2430 | SLC-2445 | SLC-2460 | SLC-2475 | SLC-2490 | SLC-24105 | SLC-24120 | SLC-24150 | SLC-24180 |
| 分辨率 | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm |
| 負載 | 20N(2kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) | 30N(3kg) |
| 適合真空度 | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar | 10-11 mbar |
| 行程范圍 | 16mm
（±6mm) | 29mm
（±14.5mm) | 35mm
（±17.5mm) | 49mm
（± 24.5mm) | 63mm
（± 31.5mm) | 69mm
（± 34.5mm) | 83mm
（± 41.5mm) | ± 51.5 (103) mm | ± 61.5 (123) mm |
| 步進1 | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm | 1-1500nm |
| 掃描范圍 | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um | >1.5um |
| 掃描分辨率 | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm | <1nm |
| 速度 | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s | >20mm/s |
| 頻率 | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz | 18.5KHz |
| 阻尼力Fb | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N | >3.5N |
| 正向力Fn | 20N | 30N | 30N | 30N | 30N | 30N | 30N | 30N | 30N |
| 升力Fl | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N | >1.5N |
| 尺寸 | 30x24x10.5
mm^3 | 45x24x10.5
mm^3 | 60x24x10.5
mm^3 | 75x24x10.5
mm^3 | 90x24x10.5
mm3 | 105x24x10.5x
mm3 | 120x24x10.5
mm^3 | 150x24x10.5
mm^3 | 180x24x10.5
mm^3 |
| 重量 | 36g | 54g | 72g | 90g | 108g | 126g | 144g | 180g | 216g |
| pitch俯仰力矩Mp | 2.2Nm | 7.5Nm | 12.8Nm | 18.1Nm | 29.5Nm | 37.5 Nm | 49.1Nm | 49.1Nm | 49.1Nm |
| yaw偏航力矩My | 2.2Nm | 7.5Nm | 12.8Nm | 18.1Nm | 29.5Nm | 37.5 Nm | 49.1Nm | 49.1Nm | 49.1Nm |
| roll扭轉力矩Mr | 1.5Nm | 2.6Nm | 3.2Nm | 3.9Nm | 4.8Nm | 5.8Nm | 6.1Nm | 6.1Nm | 6.1Nm |
Closed-Loop-S
傳感器分辨率 | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm | 1nm |
Closed-Loop-S
重復精度2 | +/-30nm | +/-45nm | +/-60nm | +/-75nm | +/-90nm | +/-105nm | +/-120nm | +/-150nm | +/-180nm |
Closed-Loop-L
傳感器分辨率 | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm | 4nm |
Closed-Loop-L
閉環(huán)分辨率 | ±500nm(H)CU
4nm MCS | ±500nm(H)CU
4nm MCS | ±500nm(H)CU
4nm MCS | ±500nm(H)CU
4nm MCS | ±500nm(H)CU
4nm MCS | ±500nm(H)CU
4nm MCS | ±500nm(H)CU
4nm MCS | ±500nm(H)CU
4nm MCS | ±500nm(H)CU
4nm MCS |
Closed-Loop-L
重復精度 | ±1um(H)CU
±60nm MCS | ±1um(H)CU
±90nm MCS | ±1um(H)CU
±120nm MCS | ±1um(H)CU
±150nm MCS | ±1um(H)CU
±180nm MCS | ±1um(H)CU
±210nm MCS | ±1um(H)CU
±240nm MCS | ±1um(H)CU
±300nm MCS | ±1um(H)CU
±360nm MCS |
