這款
萬向旋轉傾斜臺是采用直驅電機制造的萬向載物臺和萬向工作臺,具有傾斜和旋轉功能提供萬向定位,廣泛用作3D激光打印萬向載物臺和微納制造萬向工作臺架。
萬向旋轉傾斜臺采用3相無鐵線性無刷伺服電機BLDC技術,為用戶帶來零反沖高精度萬向傾斜旋轉運動,具有*精度高,重復精度高和摩擦低的特點。
萬向旋轉傾斜臺采用線性非接觸式光學編碼器作為反饋系統(tǒng),使得位置控制高達亞納米級分辨率。
萬向旋轉傾斜臺采用自然老化鋁合金確保了萬向節(jié)臺高溫穩(wěn)定性和輕巧性,以及優(yōu)良的長周期運動,導軌系統(tǒng)不會發(fā)生漂移。
萬向旋轉傾斜臺可以用于潔凈空間環(huán)境或真空度10^-3Torr的真空環(huán)境,也可根據(jù)用戶要求提供高真空
萬向傾斜旋轉臺。
萬向旋轉傾斜臺可以輕松地直接連接到光學平臺上,也可與
直驅線性平移臺搭建成電動4軸定位平臺系統(tǒng),非常適合微納制造。
萬向旋轉傾斜臺還可以安裝到花崗巖龍門架或高精度平臺上實現(xiàn)高精度萬向定位。
萬向旋轉傾斜臺規(guī)格參數(shù)| 傾斜軸向 | Tilt (A) Axis | Yaw (B) Axis |
| 運動學和反饋系統(tǒng)規(guī)格參數(shù) |
| 角度范圍 | ±130度 | ±360度 (無限) |
| 編碼器類型 | 光學編碼器 |
| 編碼器型號 | LEN2 |
| 編碼器分辨率 1) | 0.023~0.184arcsec |
| 編碼器接口 | 差分RS422 或模擬SIN/COS |
| 內部放大倍數(shù) | YES (optionally analog SIN/COS) |
| 放大系數(shù) | 4-200 (on demand) |
| Encoder Grating Period | 20µm |
| Reference Mark (Index) | Yes |
| Absolute Accuracy 2) |
| Before Calibration | ±218 / ±45.00 µrad / arcsec |
| After Calibration | ±14.54 / ±3.00 µrad / arcsec |
| Uni-Directional Repeatability, µrad / arcsec | N/A |
| Bi-Directional Repeatability (peak to peak) 2) | ±7.30 / ±1.50 µrad / arcsec |
| Bi-Directional Repeatability (RMS) 2) | ±2.90 / ±0.60 µrad / arcsec |
| 偏心率Eccentricity 3) | ±5.00 µm |
| 擺動Wobble 3) | ±19.40 / ±4.00 µrad / arcsec |
| Maximum Velocity (no load, @300VDC) 4) | <9000 / 1500 deg/s / RPM |
| Maximum Acceleration (no load) 5) | 1080000 / 180 deg/s2 / kRPM/s2 |
| Maximum torque (continuous)5) | 5.4Nm |
| Limits Switches | N/A |
| Load, Guiding & Transmission Information |
| Design Type | Torque Motor (Direct-Drive)
Two-Axis Rotation (Gimbal) Stage |
| Motor Model | TM1 |
| Motor Design Type | Torque Motor |
| Maximum Bus Voltage, VDC | <320 |
| Load Capacity (Centrally Placed) 6) |
| Horizontal | 1kg |
| Vertical | 1kg |
| Moving Mass 7) | 6.6kg | 1.55kg |
| Guiding System | Crossed roller bearings |
| Material & Environment Conditions |
| Housing Material | Aluminum Alloy |
| Housing Coating (Finish) | Black Anodizing |
| Environment Pressure | Normal Atmosphere |
| Operating Temperature, °C | 20±2 |
| Control, Communication and Cabling |
| Recommended Controllers 8) | ACS Products Line or 8SMC5-USB series |
| Recommended Drivers 8) | ACS Products Line or 8SMC5-USB series |
| Recommended Power Supply 9) | 2 phase / 3 phase source |
| Recommended Communication Interface 11) | EtherCAT / RS232 / USB / TCP-IP |
| Cable Length, m | 2 (other by request) |
| Differential Outputs 10) | On request |
| Accessories Information |
| Base Plate for Mechanical Interface | Not required |
| Additional Details |
| Magnetic Brake | Yes | No |
| Dimensions of Moving Platform | Ø90mm |
| Central Aperture | N/A | Ø15mm |
| Overall Linear Stage Dimensions (W x L x H) | 149 x 349 x 161mm (entire system) |
| Measurement System | Metric / Imperial (Base) |
| RoHS | Compliant |
| Weight, kg | 12.3kg (entire system) |
1) 默認為x4轉PPR-脈沖數(shù)/每轉，模擬SIN/COS編碼器接口
2)精度和雙向重復定位精度采用Zygo ZMI 501 Michelson laser interferometer測量計算
3) Pitch & Yaw 采用
11D-ALI-COL 電子自相關儀器測試,電子自相關儀
11D-ALI-COL分辨率1µrad. 環(huán)境誤差1µrad.
4) 速度由編碼器限制和驅動器CUT-OF頻率以及導向系統(tǒng)限制.
5)加速度由驅動器“Peak Current, Motors` Peak Current and External Load (inertia)決定.
6)負載能力由導向系統(tǒng)決定.
7) 運動質量是系統(tǒng)常數(shù)m
0,通常是沒有負載時的慣性。
8) 推薦的控制器和驅動器有助于發(fā)揮電動平移臺的性能.
9) 推薦的電源是根據(jù)用戶的占空比和負載來選擇.
10) 差分輸出接口,可提供主動或被動LCMv2接口.
11) 標量控制可采用USB / TCP-IP / RS-232通訊接口,矢量控制建議采用EtherCAT接口。
