PCG55x 大氣壓至中真空真空計

INFICON 皮拉尼電容式膜片真空計 (PCG55x) 集 INFICON
皮拉尼技術和陶瓷電容式膜片傳感器的優勢于一體。

在 10 毫巴和大氣壓力之間的測量范圍內，電容式膜片技術不受氣體類型限制，能夠提供高精確度的壓力測量值。
PCG55x型皮拉尼電容式膜片真空計功能豐富，提供多種配置，可滿足您的特定應用要求。

益處

在 10 毫巴以上壓力下不受氣體類型限制 – 能夠安全排放任何氣體混合物
在大氣壓力下具有高度的準確性和再現性 – 能夠進行可靠的大氣壓力檢測
快速大氣檢測功能 – 能夠消除等待時間并縮短過程周期
靈活的安裝方向 – 提供自由的工具設計
可配備鎢絲 (PCG550)、鎳絲 (PCG552) 或全陶瓷涂層 (PCG554) 傳感器裝置用于高腐蝕性應用
易于更換的即插即用式傳感器元件與板載校準數據 – 確保高度再現性和低擁有成本
便于集成的可選輸出信號
可選大氣開關、顯示屏和數字接口

典型應用

加載互鎖控制
前級真空壓力測量
真空系統中的安全電路
中真空和低真空范圍內的一般真空測量和控制

新聞

現有全新EtherCAT數字接口供應！

零件號

規格

類型		PCG550 Tungsten	PCG552 Nickel	PCG554 ceramic coated
測量范圍	mbarTorr	5×10^-5 … 1500	5×10^-5 … 1500	5×10^-5 … 1500
精度
5×10^-4 … 1×10^-3 毫巴 (N₂)	% of reading	±50	±50	±50
1×10^-3 … 100 毫巴 (N₂)	% of reading	±15	±15	±15
100 … 950 毫巴	% of reading	±5	±5	±5
950 … 1050 毫巴	% of reading	±2.5	±2.5	±2.5
可重復性
1×10^-3 … 1100 毫巴 (N₂)	% of reading	±2	±2	±2
容許壓力	bar (absolute)	≤5	≤5	≤5
壓力，	bar (absolute)	≥10	≥10	≥10
容許溫度
運行（環境）	°C	+10 … +50	+10 … +50	+10 … +50
貯存	°C	-20 … +65	-20 … +65	-20 … +65
在法蘭處烘烤	°C	≤80	≤80	≤80
在長管法蘭處烘烤	°C	≤250	≤250	≤250
電源電壓	V (dc)	+15 … +30	+15 … +30	+15 … +30
功耗
無現場總線	W	≤2.5	≤2.5	≤2.5
DeviceNet™	W	≤3	≤3	≤3
Profibus	W	≤3	≤3	≤3
輸出信號模擬 3PCx-0xx-xxx0	V	0 … +10.23	0 … +10.23	0 … +10.23
輸出信號模擬 3PCx-0xx-xxx1	V	0 … +8.68	0 … +8.68	0 … +8.68
輸出信號模擬 3PCx-0xx-xxx2	V	0 … +5.659	0 … +5.659	0 … +5.659
輸出信號模擬 3PCx-0xx-xxx3	V	0 … +9.05	0 … +9.05	0 … +9.05
測量范圍 3PCx-0xx-xxx0	V	+0.61 … +10.23	+0.61 … +10.23	+0.61 … +10.23
測量范圍 3PCx-0xx-xxx1	V	+1.2 … +8.68	+1.2 … +8.68	+1.2 … +8.68
測量范圍 3PCx-0xx-xxx2	V	+0.375 … +5.659	+0.375 … +5.659	+0.375 … +5.659
測量范圍 3PCx-0xx-xxx3	V	+1.57 … +9.05	+1.57 … +9.05	+1.57 … +9.05
電壓與壓強
3PCx-0xx-xxx0	volts per decade	1.286	1.286	1.286
3PCx-0xx-xxx1 / -xxx2 / -xxx3	volts per decade	1	1	1
負載電阻	k?	>10	>10	>10
設定點繼電器
設定點數量		2	2	2
范圍 (N₂)	mbar	5×10^-5 … 1000	5×10^-5 … 1000	5×10^-5 … 1000
繼電器觸點		n.o., potential free	n.o., potential free	n.o., potential free
滯后	% of threshold	10	10	10
觸點額定固態繼電器	V (dc)A (dc)	≤30	≤30	≤30
觸點額定機械繼電器	V (dc)A (dc)	≤30	≤30	≤30
轉換時間	ms	≤30	≤30	≤30
接口（數字）		RS232C	RS232C	RS232C
電氣連接
3PCx-0xx-x0xx		FCC, 8-pin	FCC, 8-pin	FCC, 8-pin
3PCx-0xx-x1xx		D-Sub, 9-pin, male	D-Sub, 9-pin, male	D-Sub, 9-pin, male
3PCx-0xx-x2xx		D-Sub, 15-pin HD, male	D-Sub, 15-pin HD, male	D-Sub, 15-pin HD, male
3PCx-0xx-x4xx		D-Sub, 15-pin HD, with RS485, male	D-Sub, 15-pin HD, with RS485, male	D-Sub, 15-pin HD, with RS485, male
電纜長度	m (ft.)	≤100 (≤330)	≤100 (≤330)	≤100 (≤330)
RS232C 運行	m (ft.)	≤30 (≤100)	≤30 (≤100)	≤30 (≤100)
暴露于真空的材料		W, Ni, NiFe, Al₂O₃, SnAg, stainless steel, glass	Ni, NiFe, Al₂O₃, SnAg, stainless steel, glass	Al₂O₃, stainless steel
內部容積
DN 16 ISO-KF	cm3	4.7	4.7	4.7
DN 16 ISO-KF 長管	cm3	14.5	14.5	14.5
DN 16 CF-F	cm3	8	8	8
DN 16 CF-R 長管	cm3	14	14	14
DN 25 ISO-KF，4 VCR	cm3	5.5	5.5	5.5
8 VCR	cm3	7	7	7
1/8'' NPT，7/16-20 UNF	cm3	5.2	5.2	5.2
表面貼裝 29 毫米/1.15 英寸	cm3	4.9	4.9	4.9
4 VCR 90°	cm3	7.9	7.9	7.9
重量
無現場總線接口	g	115 … 130	115 … 130	115 … 130
帶現場總線接口	g	230 … 250	230 … 250	230 … 250
保護等級		IP 40	IP 40	IP 40
標準
CE 合規		EN 61000-6-2/-6-3, EN 61010	EN 61000-6-2/-6-3, EN 61010	EN 61000-6-2/-6-3, EN 61010
ETL 認證		UL 61010-1, CSA 22.2 No.61010-1	UL 61010-1, CSA 22.2 No.61010-1	UL 61010-1, CSA 22.2 No.61010-1
DeviceNet™
協議		DeviceNet™, group 2 slave only	DeviceNet™, group 2 slave only	DeviceNet™, group 2 slave only
數據率開關	kBaud	125, 250, 500 or network programmable	125, 250, 500 or network programmable	125, 250, 500 or network programmable
電纜長度 125 kbps	m (ft.)	500 (1650)	500 (1650)	500 (1650)
電纜長度 250 kbps	m (ft.)	250 (825)	250 (825)	250 (825)
電纜長度 500 kbps	m (ft.)	100 (330)	100 (330)	100 (330)
MAC ID		2 switches (address 00 - 63) or network programmable	2 switches (address 00 - 63) or network programmable	2 switches (address 00 - 63) or network programmable
數字功能		read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
技術規格		DeviceNet™ "Vacuum Gauge Device Profile"	DeviceNet™ "Vacuum Gauge Device Profile"	DeviceNet™ "Vacuum Gauge Device Profile"
設備類型		''CG'' for combination gauge	''CG'' for combination gauge	''CG'' for combination gauge
I / O 從屬傳訊		polling only	polling only	polling only
DeviceNet™ 的電源電壓 3PI6- / 3PI7- / 3PI8-0xx-xxxx	V (dc)	+15 … +30	+15 … +30	+15 … +30
功耗 3PI6- / 3PI7- / 3PI8-0xx-xxxx	W	≤3	≤3	≤3
DeviceNet 連接器		Micro-Style, 5-pin, male	Micro-Style, 5-pin, male	Micro-Style, 5-pin, male
Profibus DP
波特率	kBaudMbaud	9.6 / 19.2 / 93.75 / 187.5 / 500	9.6 / 19.2 / 93.75 / 187.5 / 500	9.6 / 19.2 / 93.75 / 187.5 / 500
地址		2 switches (address 00 - 127) or network programmable	2 switches (address 00 - 127) or network programmable	2 switches (address 00 - 127) or network programmable
數字功能		read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
Profibus DP 連接器		D-Sub, 9-pin, female	D-Sub, 9-pin, female	D-Sub, 9-pin, female
RS485C
波特率	kBaud	9.6 / 19.2 / 38.4 /57.6	9.6 / 19.2 / 38.4 /57.6	9.6 / 19.2 / 38.4 /57.6
地址		2 switches (address 00 - 255)	2 switches (address 00 - 255)	2 switches (address 00 - 255)
數字功能		read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
RS485 連接器		D-Sub, 15-pin HD, male	D-Sub, 15-pin HD, male	D-Sub, 15-pin HD, male
EtherCAT
協議 EtherCAT		protocol specialized for EtherCAT	protocol specialized for EtherCAT	protocol specialized for EtherCAT
通訊標準		ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"	ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"	ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"
節點地址		Explicit Device Identification	Explicit Device Identification	Explicit Device Identification
物理層		100BASE-Tx (IEEE 802.3)	100BASE-Tx (IEEE 802.3)	100BASE-Tx (IEEE 802.3)
EtherCAT 連接器		RJ45, 8-pin (socket), IN and OUT	RJ45, 8-pin (socket), IN and OUT	RJ45, 8-pin (socket), IN and OUT
電纜		shielded Ethernet CAT5e or higher	shielded Ethernet CAT5e or higher	shielded Ethernet CAT5e or higher
電纜長度	m (ft.)	≤100 (330)	≤100 (330)	≤100 (330)
過程數據		Fixed PDO mapping and configurable PDO mapping	Fixed PDO mapping and configurable PDO mapping	Fixed PDO mapping and configurable PDO mapping
郵箱 (CoE)		SDO requests, responses and information	SDO requests, responses and information	SDO requests, responses and information