PSG55x 大氣壓至中真空真空計

INFICON 皮拉尼PSG55x標準真空計與其兄弟系列 PCG55x 及
PSG50x型真空計一樣均采用的數字皮拉尼技術。其堅固耐用的傳感器設計緊湊，融合了各種功能，是高低真空測量的之選。

益處

可配備鎢絲 (PSG550)、鎳絲 (PSG552) 或全陶瓷涂層 (PSG554) 傳感器裝置用于高腐蝕性應用
可選顯示屏、設定點和數字接口
易于更換的即插即用式傳感器元件與板載校準數據 - 確保高度再現性和低擁有成本
可選輸出信號和各種插孔型號，便于集成
靈活的安裝方向 - 提供自由的工具設計
所有型號均提供診斷端口
合規性與標準： CE、EN、UL、CSA、RoHS

典型應用

前級真空壓力測量
真空系統中的安全電路
低真空和高真空范圍內的一般真空測量與控制

新聞

現有全新EtherCAT數字接口供應！

零件號

規格

類型		PSG550 Tungsten	PSG552 Nickel	PSG554 ceramic coated
測量范圍	mbar	5×10^-5 … 1000	5×10^-5 … 1000	5×10^-5 … 1000
精度 (N₂)
5×10^-4 … 1×10^-3 毫巴	% of reading	±50	±50	±50
1×10^-3 … 100 毫巴	% of reading	±15	±15	±15
100 … 1000 毫巴	% of reading	±50	±50	±50
可重復性 (N₂)
1×10^-3 … 100 毫巴	% of reading	±2	±2	±2
容許壓力	bar (absolute)	≤5	≤5	≤5
壓力，大	bar (absolute)	10	10	10
容許溫度
運行（環境）	°C	+10 … +50	+10 … +50	+10 … +50
貯存	°C	-20 … +65	-20 … +65	-20 … +65
在法蘭處烘烤	°C	≤80	≤80	≤80
在長管法蘭處烘烤	°C	≤250	≤250	≤250
電源電壓	V (dc)	+15 … +30	+15 … +30	+15 … +30
功耗
無現場總線	W	≤2.5	≤2.5	≤2.5
DeviceNet?	W	≤3	≤3	≤3
Profibus	W	≤3	≤3	≤3
輸出信號模擬 3PIx-0xx-xxx0	V	0 … +10	0 … +10	0 … +10
輸出信號模擬 3PIx-0xx-xxx1	V	0 … +8.5	0 … +8.5	0 … +8.5
輸出信號模擬 3PIx-0xx-xxx2	V	0 … +5.529	0 … +5.529	0 … +5.529
輸出信號模擬 3PIx-0xx-xxx3	V	0 … +8.875	0 … +8.875	0 … +8.875
測量范圍 3PIx-0xx-xxx0	V	+0.61 … +10	+0.61 … +10	+0.61 … +10
測量范圍 3PIx-0xx-xxx1	V	+1.2 … +8.5	+1.2 … +8.5	+1.2 … +8.5
測量范圍 3PIx-0xx-xxx2	V	+0.375 … +5.529	+0.375 … +5.529	+0.375 … +5.529
測量范圍 3PIx-0xx-xxx3	V	+1.57 … +8.875	+1.57 … +8.875	+1.57 … +8.875
電壓與壓強
3PIx-0xx-xxx0	volts per decade	1.286	1.286	1.286
3PIx-0xx-xxx1 / -xxx2 / -xxx3	volts per decade	1	1	1
負載電阻	k?	>10	>10	>10
設定點繼電器
設定點數量		2	2	2
范圍 (N₂)	mbar	5×10^-5 … 1000	5×10^-5 … 1000	5×10^-5 … 1000
繼電器觸點		n.o., potential free	n.o., potential free	n.o., potential free
滯后	% of threshold	10	10	10
觸點額定固態繼電器	V (dc)A (dc)	≤30	≤30	≤30
觸點額定機械繼電器	V (dc)A (dc)	≤30	≤30	≤30
轉換時間	ms	≤30	≤30	≤30
接口（數字）		RS232C	RS232C	RS232C
電氣連接
3PIx-0xx-x0xx		FCC, 8-pin	FCC, 8-pin	FCC, 8-pin
3PIx-0xx-x1xx		D-Sub, 9-pin, male	D-Sub, 9-pin, male	D-Sub, 9-pin, male
3PIx-0xx-x2xx		D-Sub, 15-pin HD, male	D-Sub, 15-pin HD, male	D-Sub, 15-pin HD, male
3PIx-0xx-x4xx		D-Sub, 15-pin HD, with RS485, male	D-Sub, 15-pin HD, with RS485, male	D-Sub, 15-pin HD, with RS485, male
電纜長度	m (ft.)	≤100 (≤330)	≤100 (≤330)	≤100 (≤330)
RS232C 運行	m (ft.)	≤30 (≤100)	≤30 (≤100)	≤30 (≤100)
暴露于真空的材料		W, Ni, NiFe, glass, SnAg, stainless steel	Ni, NiFe, glass, SnAg, stainless steel	Al₂O₃, stainless steel
內部容積
DN 16 ISO-KF	cm3	4.7	4.7	4.7
DN 16 ISO-KF 長管	cm3	14.5	14.5	14.5
DN 16 CF-F	cm3	8	8	8
DN 16 CF-R 長管	cm3	14	14	14
DN 25 ISO-KF，4 VCR	cm3	5.5	5.5	5.5
8 VCR	cm3	7	7	7
1/8'' NPT，7/16-20 UNF	cm3	5.2	5.2	5.2
表面貼裝 29 毫米/1.15 英寸	cm3	4.9	4.9	4.9
4 VCR 90°	cm3	7.9	7.9	7.9
重量
無現場總線接口	g	115 … 130	115 … 130	115 … 130
帶現場總線接口	g	230 … 250	230 … 250	230 … 250
保護等級		IP 40	IP 40	IP 40
標準
CE 合規		EN 61000-6-2/-6-3, EN 61010	EN 61000-6-2/-6-3, EN 61010	EN 61000-6-2/-6-3, EN 61010
ETL 認證		UL 61010-1, CSA 22.2 No.61010-1	UL 61010-1, CSA 22.2 No.61010-1	UL 61010-1, CSA 22.2 No.61010-1
DeviceNet?
協議		DeviceNet?, group 2 slave only	DeviceNet?, group 2 slave only	DeviceNet?, group 2 slave only
數據率開關	kBaud	125, 250, 500 or network programmable	125, 250, 500 or network programmable	125, 250, 500 or network programmable
電纜長度 125 kbps	m (ft.)	500 (1650)	500 (1650)	500 (1650)
電纜長度 250 kbps	m (ft.)	250 (825)	250 (825)	250 (825)
電纜長度 500 kbps	m (ft.)	100 (330)	100 (330)	100 (330)
MAC ID		2 switches (address 00 - 63) or network programmable	2 switches (address 00 - 63) or network programmable	2 switches (address 00 - 63) or network programmable
數字功能		read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
技術規格		DeviceNet? "Vacuum Gauge Device Profile"	DeviceNet? "Vacuum Gauge Device Profile"	DeviceNet? "Vacuum Gauge Device Profile"
設備類型		''CG'' for combination gauge	''CG'' for combination gauge	''CG'' for combination gauge
I / O 從屬傳訊		polling only	polling only	polling only
DeviceNet? 的電源電壓 3PI6- / 3PI7- / 3PI8-0xx-xxxx	V (dc)	+15 … +30	+15 … +30	+15 … +30
功耗 3PI6- / 3PI7- / 3PI8-0xx-xxxx	W	≤3	≤3	≤3
DeviceNet 連接器		Micro-Style, 5-pin, male	Micro-Style, 5-pin, male	Micro-Style, 5-pin, male
Profibus DP
波特率	kBaudMbaud	9.6 / 19.2 / 93.75 / 187.5 / 500	9.6 / 19.2 / 93.75 / 187.5 / 500	9.6 / 19.2 / 93.75 / 187.5 / 500
地址		2 switches (address 00 - 127) or network programmable	2 switches (address 00 - 127) or network programmable	2 switches (address 00 - 127) or network programmable
數字功能		read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
Profibus DP 連接器		D-Sub, 9-pin, female	D-Sub, 9-pin, female	D-Sub, 9-pin, female
RS485C
波特率	kBaud	9.6 / 19.2 / 38.4 /57.6	9.6 / 19.2 / 38.4 /57.6	9.6 / 19.2 / 38.4 /57.6
地址		2 switches (address 00 - 255)	2 switches (address 00 - 255)	2 switches (address 00 - 255)
數字功能		read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error	read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
RS485 連接器		D-Sub, 15-pin HD, male	D-Sub, 15-pin HD, male	D-Sub, 15-pin HD, male
EtherCAT
協議 EtherCAT		protocol specialized for EtherCAT	protocol specialized for EtherCAT	protocol specialized for EtherCAT
通訊標準		ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"	ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"	ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"
節點地址		Explicit Device Identification	Explicit Device Identification	Explicit Device Identification
物理層		100BASE-Tx (IEEE 802.3)	100BASE-Tx (IEEE 802.3)	100BASE-Tx (IEEE 802.3)
EtherCAT 連接器		RJ45, 8-pin (socket), IN and OUT	RJ45, 8-pin (socket), IN and OUT	RJ45, 8-pin (socket), IN and OUT
電纜		shielded Ethernet CAT5e or higher	shielded Ethernet CAT5e or higher	shielded Ethernet CAT5e or higher
電纜長度	m (ft.)	≤100 (330)	≤100 (330)	≤100 (330)
過程數據		Fixed PDO mapping and configurable PDO mapping	Fixed PDO mapping and configurable PDO mapping	Fixed PDO mapping and configurable PDO mapping
(CoE)		SDO requests, responses and information	SDO requests, responses and information	SDO requests, responses and information