SLA5800 Series: Digital Thermal Mass Flow Meter/Flow Controller, Elastomer Seals
Brooks SLA5800 Series elastomer sealed digital thermal mass flow measurement and control products offer unparalleled flexibility and performance. They offer faster response, better accuracy and improved control over traditional analog devices. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for use in a variety of service areas.
流量范圍：3sccm-30slpm 精度：1% Rate or 0.7% Rate 0.2% FS 壓力：300bar 4500psig 溫度：65℃ 150F 信號：0-5V 4-20mA RS-485
