HORIBA SEC-4400M
controllersSEC-4400 series The best-selling series that showed the world what ultra-clean means
Mass flow controllersSEC-4401/4501 The ultimate in analog mass flow controllerssUltra clean: All metal construction (SEC-4000M type) sCompatible with a wide variety of flow rate control needs: Flow rate control between 0.1 SCCM and 100 SLM (N2) available in a single series. sModels that prevent thermal siphoning: Mass flow controllers that are not affected by the installation orientation (SEC-4400MF/4500MF types). Feature a new sensor (patent pending) that prevents thermal siphoning through the very principles of its construction. sConforming gases: C2F6, C3F8, C4F8, SF6, SiF4, etc, sUltra clean: All metal construction (SEC-4000M type) sAuto-close function is standard. sModel with purge mode: SEC-4400SP type sWide range model: SEC-4400SR type
HORIBA SEC-4401
The ultimate in analog mass flow controllers
sUltra clean: All metal construction (SEC-4000M type) sCompatible with a wide variety of flow rate control needs: Flow rate control between 0.1 SCCM and 100 SLM (N2) available in a single series. sModels that prevent thermal siphoning: Mass flow controllers that are not affected by the installation orientation (SEC-4400MF/4500MF types). Feature a new sensor (patent pending) that prevents thermal siphoning through the very principles of its construction. sConforming gases: C2F6, C3F8, C4F8, SF6, SiF4, etc, sUltra clean: All metal construction (SEC-4000M type) sAuto-close function is standard. sModel with purge mode: SEC-4400SP type sWide range model: SEC-4400SR type
sHigh reliability: New sensor design, stable zero point: achieve ±20 mV/y (typical) sHigh precision: ±0.8 F.S. (SEC-4401 type) sFast response:
HORIBA SEC-4500R
Feature an ultra-quick start function and offer response times under a second over the entire flow rate range. sModels that prevent thermal siphoning: Mass flow controllers that are not affected by the installation orientation (SEC-4000MF type). Feature a new sensor (patent pending) that prevents thermal siphoning through the very principles of its construction. Conforming gases: C3F6, C3F8, C4F8, SF6, SiF4, etc, sUltra clean: All metal construction (SEC-4001M type) sAuto-close function is standard.
