SKY? CDG100D 0.1 ... 1000 托/毫巴
INFICON SKY CDG100D 壓力計是實現精確總壓測量與控制的理想之選。 CDG100D
真空計溫度控制在 100 °C，具有的性能，適用于苛刻的半導體和等離子過程。 在 100 毫托至 1000
托滿刻度范圍內均可使用，帶有所有常用類型的法蘭和現場總線接口，能夠提供 0 至 10V、不受氣體類型限制的線性壓力信號。 INFICON
電容式壓力計采用超純氧化鋁陶瓷隔膜，具有防腐蝕性。 陶瓷傳感器具有信號穩定性更佳、從大氣恢復的速度更快、預熱時間短和使用壽命長等諸多優勢。 INFICON
CDG 品質，成本效益，適用于苛刻的半導體、等離子和真空應用。
益處
- 擁有成本更低，預熱速度快 50%，節能，低功耗
- 易于集成，各種滿刻度、法蘭和接口，標配兩個設定點
- 輕松一鍵調零或遠程信號調零指令，可調零點偏移
- 診斷端口用于快速維修和維護
- 兩年保修服務，*的加熱概念和真空計保護延長了使用壽命
- 的信號穩定性和可重復性，即使是的等離子應用，都無需*執行重新校準
- 合規性與標準： CE、EN、UL、SEMI、RoHS
典型應用
- 用于刻蝕、CVD、PVD 和其他半導體制造過程
- 化學和腐蝕性高溫過程
- 需要真空計保護的一般薄膜和真空過程
新聞
配備 EtherCAT 數字接口現在可用！零件號
規格
| 類型 | 1000 ... 500 Torr / mbar | 200 ... 1 Torr / mbar | 0.5 ... 0.1 Torr / mbar | |
|---|---|---|---|---|
| 精度 (1) | % of reading | 0.2 | 0.2 | 0.4 |
| 溫度效應 | ||||
| 零點 | percent FS/°C | 0.0025 | 0.0025 | 0.005 |
| 滿量程 | % of reading / °C | 0.02 | 0.02 | 0.02 |
| 壓力，大 | kPa (absolute) | 400 | 260 | 130 |
| 分辨率 | percent FS | 0.003 | 0.003 | 0.003 |
| 低讀數 | percent FS | 0.01 | 0.01 | 0.01 |
| 建議的低讀數 | percent FS | 0.05 | 0.05 | 0.05 |
| 建議的低控制壓力 | percent FS | 0.5 | 0.5 | 0.5 |
| 溫度 | ||||
| 運行（周圍環境）（5） | °C | +10 … +50 | ||
| 在法蘭處烘烤 | °C | ≤110 | ≤110 | ≤110 |
| 貯存 | °C | –20 … +65 | –40 … +65 | –40 … +65 |
| 電源電壓 | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
| 功耗 | ||||
| 加熱時 | W | ≤15 | ≤15 | ≤15 |
| 運行溫度 | W | ≤10 | ≤10 | ≤10 |
| 輸出信號（模擬） | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 |
| 反應時間 (2) | ms | 30 | 30 | 130 / 30 (3) |
| 保護等級 | IP 40 | IP 40 | IP 40 | |
| 標準 | ||||
| CE 合規 | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS | EN 61000?6?2/-6-3, EN 61010 & RoHS | |
| ETL 認證 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | UL 61010?1, CSA 22.2 No.61010?1 | |
| SEMI 合規 (5) | SEMI S2 | |||
| 電氣連接 | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | |
| 設定點 | ||||
| 設定點數量 | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
| 繼電器觸點 | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
| 滯后 | percent FS | 1 | 1 | 1 |
| 診斷端口 | ||||
| 協議 | RS232-C | RS232-C | RS232-C | |
| 讀數 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 設置 | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| 暴露于真空的材料 | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) | |
| 內部容積 | ||||
| 內部容積 1/2'' 管 | cm3 (in.3) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內部容積 DN 16 ISO KF | cm3 (in.3) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內部容積 DN 16 CF-R | cm3 (in.3) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 內部容積 8 VCR? | cm3 (in.3) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
| 重量 | ||||
| 重量 1/2'' 管 | g | 837 | 837 | 837 |
| 重量 DN 16 ISO KF | g | 852 | 852 | 852 |
| 重量 DN 16 CF-R | g | 875 | 875 | 875 |
| 重量 8 VCR? | g | 897 | 897 | 897 |
| EtherCAT | ||||
| 協議 EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| 通訊標準 | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | |
| 節點地址 | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
| 物理層 | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| 數字功能讀取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 數字功能設置 | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| 過程數據 | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
| (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
| EtherCAT 連接器 | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
| 電纜 | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| 電纜長度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
| DeviceNet? | ||||
| 協議 | DeviceNet?, group 2 slave only | DeviceNet?, group 2 slave only | DeviceNet?, group 2 slave only | |
| 數據率 | kBaud | 125, 250, 500 by switch or network programmable | 125, 250, 500 by switch or network programmable | 125, 250, 500 by switch or network programmable |
| 電纜長度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
| 電纜長度 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
| 電纜長度 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
| MAC ID | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable | address 00 - 63 by switch or network programmable | |
| 數字功能讀取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 數字功能設置 | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| 技術規格 | DeviceNet? "Vacuum Gauge Device Profile" (ODVA) | DeviceNet? "Vacuum Gauge Device Profile" (ODVA) | DeviceNet? "Vacuum Gauge Device Profile" (ODVA) | |
| 設備類型 | ''VG'' vacuum gauge | ''VG'' vacuum gauge | ''VG'' vacuum gauge | |
| I / O 從屬傳訊 | polling only | polling only | polling only | |
| 真空計 D 型連接器的電源電壓 | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W | +14 … +30 VDC or ±15 V / ≤12 W | |
| 為微型連接器上的 DeviceNet 收發器提供電壓 | 24 V nom / <2 W (11 … 25 V) | 24 V nom / <2 W (11 … 25 V) | 24 V nom / <2 W (11 … 25 V) | |
| DeviceNet? 連接器 | microstyle, 5 pin, male | microstyle, 5 pin, male | microstyle, 5 pin, male | |
| CDG（模擬輸出、CDG 電源電壓、設定點）連接器 | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male | |
| Profibus DP | ||||
| 波特率 | kBaudMbaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| 地址 | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable | address 00 - 125 by switch or network programmable | |
| 數字功能讀取 | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
| 數字功能設置 | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
| Profibus DP 連接器 | D-sub, 9 pin, female | D-sub, 9 pin, female | D-sub, 9 pin, female | |
| CDG（模擬輸出、電源電壓、設定點）連接器 | D-sub, 15 pin, male | D-sub, 15 pin, male | D-sub, 15 pin, male | |
(1) 25 °C 環境溫度時非線性、滯后、可重復，運行 2 小時后不產生溫度效應。
(2) 增加 10 … 90 % FS
(3) 僅適用于壓力控制類型。
(4) 18% 鉻、10% 鎳、3% 鉬、69% 鐵
, 環境溫度 >40°C 可增大表面溫度高于 SEMI S2 的規定值
