PCG55x 大氣壓至中真空真空計
INFICON 皮拉尼電容式膜片真空計 (PCG55x) 集 INFICON
皮拉尼技術和陶瓷電容式膜片傳感器的優勢于一體。
在 10 毫巴和大氣壓力之間的測量范圍內，電容式膜片技術不受氣體類型限制，能夠提供高精確度的壓力測量值。
PCG55x型皮拉尼電容式膜片真空計功能豐富，提供多種配置，可滿足您的特定應用要求。
益處
- 在 10 毫巴以上壓力下不受氣體類型限制 – 能夠安全排放任何氣體混合物
- 在大氣壓力下具有高度的準確性和再現性 – 能夠進行可靠的大氣壓力檢測
- 快速大氣檢測功能 – 能夠消除等待時間并縮短過程周期
- 靈活的安裝方向 – 提供自由的工具設計
- 可配備鎢絲 (PCG550)、鎳絲 (PCG552) 或全陶瓷涂層 (PCG554) 傳感器裝置用于高腐蝕性應用
- 易于更換的即插即用式傳感器元件與板載校準數據 – 確保高度再現性和低擁有成本
- 便于集成的可選輸出信號
- 可選大氣開關、顯示屏和數字接口
典型應用
- 加載互鎖控制
- 前級真空壓力測量
- 真空系統中的安全電路
- 中真空和低真空范圍內的一般真空測量和控制
新聞
現有全新EtherCAT數字接口供應！
零件號
規格
| 類型 | PCG550 Tungsten | PCG552 Nickel | PCG554 ceramic coated | |
|---|---|---|---|---|
| 測量范圍 | mbarTorr | 5×10-5 … 1500 | 5×10-5 … 1500 | 5×10-5 … 1500 |
| 精度 | ||||
| 5×10-4 … 1×10-3 毫巴 (N2) | % of reading | ±50 | ±50 | ±50 |
| 1×10-3 … 100 毫巴 (N2) | % of reading | ±15 | ±15 | ±15 |
| 100 … 950 毫巴 | % of reading | ±5 | ±5 | ±5 |
| 950 … 1050 毫巴 | % of reading | ±2.5 | ±2.5 | ±2.5 |
| 可重復性 | ||||
| 1×10-3 … 1100 毫巴 (N2) | % of reading | ±2 | ±2 | ±2 |
| 容許壓力 | bar (absolute) | ≤5 | ≤5 | ≤5 |
| 壓力，大 | bar (absolute) | ≥10 | ≥10 | ≥10 |
| 容許溫度 | ||||
| 運行（環境） | °C | +10 … +50 | +10 … +50 | +10 … +50 |
| 貯存 | °C | -20 … +65 | -20 … +65 | -20 … +65 |
| 在法蘭處烘烤 | °C | ≤80 | ≤80 | ≤80 |
| 在長管法蘭處烘烤 | °C | ≤250 | ≤250 | ≤250 |
| 電源電壓 | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
| 功耗 | ||||
| 無現場總線 | W | ≤2.5 | ≤2.5 | ≤2.5 |
| DeviceNet? | W | ≤3 | ≤3 | ≤3 |
| Profibus | W | ≤3 | ≤3 | ≤3 |
| 輸出信號模擬 3PCx-0xx-xxx0 | V | 0 … +10.23 | 0 … +10.23 | 0 … +10.23 |
| 輸出信號模擬 3PCx-0xx-xxx1 | V | 0 … +8.68 | 0 … +8.68 | 0 … +8.68 |
| 輸出信號模擬 3PCx-0xx-xxx2 | V | 0 … +5.659 | 0 … +5.659 | 0 … +5.659 |
| 輸出信號模擬 3PCx-0xx-xxx3 | V | 0 … +9.05 | 0 … +9.05 | 0 … +9.05 |
| 測量范圍 3PCx-0xx-xxx0 | V | +0.61 … +10.23 | +0.61 … +10.23 | +0.61 … +10.23 |
| 測量范圍 3PCx-0xx-xxx1 | V | +1.2 … +8.68 | +1.2 … +8.68 | +1.2 … +8.68 |
| 測量范圍 3PCx-0xx-xxx2 | V | +0.375 … +5.659 | +0.375 … +5.659 | +0.375 … +5.659 |
| 測量范圍 3PCx-0xx-xxx3 | V | +1.57 … +9.05 | +1.57 … +9.05 | +1.57 … +9.05 |
| 電壓與壓強 | ||||
| 3PCx-0xx-xxx0 | volts per decade | 1.286 | 1.286 | 1.286 |
| 3PCx-0xx-xxx1 / -xxx2 / -xxx3 | volts per decade | 1 | 1 | 1 |
| 負載電阻 | k? | >10 | >10 | >10 |
| 設定點繼電器 | ||||
| 設定點數量 | 2 | 2 | 2 | |
| 范圍 (N2) | mbar | 5×10-5 … 1000 | 5×10-5 … 1000 | 5×10-5 … 1000 |
| 繼電器觸點 | n.o., potential free | n.o., potential free | n.o., potential free | |
| 滯后 | % of threshold | 10 | 10 | 10 |
| 觸點額定固態繼電器 | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
| 觸點額定機械繼電器 | V (dc)A (dc) | ≤30 | ≤30 | ≤30 |
| 轉換時間 | ms | ≤30 | ≤30 | ≤30 |
| 接口（數字） | RS232C | RS232C | RS232C | |
| 電氣連接 | ||||
| 3PCx-0xx-x0xx | FCC, 8-pin | FCC, 8-pin | FCC, 8-pin | |
| 3PCx-0xx-x1xx | D-Sub, 9-pin, male | D-Sub, 9-pin, male | D-Sub, 9-pin, male | |
| 3PCx-0xx-x2xx | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | |
| 3PCx-0xx-x4xx | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | D-Sub, 15-pin HD, with RS485, male | |
| 電纜長度 | m (ft.) | ≤100 (≤330) | ≤100 (≤330) | ≤100 (≤330) |
| RS232C 運行 | m (ft.) | ≤30 (≤100) | ≤30 (≤100) | ≤30 (≤100) |
| 暴露于真空的材料 | W, Ni, NiFe, Al2O3, SnAg, stainless steel, glass | Ni, NiFe, Al2O3, SnAg, stainless steel, glass | Al2O3, stainless steel | |
| 內部容積 | ||||
| DN 16 ISO-KF | cm3 | 4.7 | 4.7 | 4.7 |
| DN 16 ISO-KF 長管 | cm3 | 14.5 | 14.5 | 14.5 |
| DN 16 CF-F | cm3 | 8 | 8 | 8 |
| DN 16 CF-R 長管 | cm3 | 14 | 14 | 14 |
| DN 25 ISO-KF，4 VCR | cm3 | 5.5 | 5.5 | 5.5 |
| 8 VCR | cm3 | 7 | 7 | 7 |
| 1/8'' NPT，7/16-20 UNF | cm3 | 5.2 | 5.2 | 5.2 |
| 表面貼裝 29 毫米/1.15 英寸 | cm3 | 4.9 | 4.9 | 4.9 |
| 4 VCR 90° | cm3 | 7.9 | 7.9 | 7.9 |
| 重量 | ||||
| 無現場總線接口 | g | 115 … 130 | 115 … 130 | 115 … 130 |
| 帶現場總線接口 | g | 230 … 250 | 230 … 250 | 230 … 250 |
| 保護等級 | IP 40 | IP 40 | IP 40 | |
| 標準 | ||||
| CE 合規 | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | EN 61000-6-2/-6-3, EN 61010 | |
| ETL 認證 | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | UL 61010-1, CSA 22.2 No.61010-1 | |
| DeviceNet? | ||||
| 協議 | DeviceNet?, group 2 slave only | DeviceNet?, group 2 slave only | DeviceNet?, group 2 slave only | |
| 數據率開關 | kBaud | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable | 125, 250, 500 or network programmable |
| 電纜長度 125 kbps | m (ft.) | 500 (1650) | 500 (1650) | 500 (1650) |
| 電纜長度 250 kbps | m (ft.) | 250 (825) | 250 (825) | 250 (825) |
| 電纜長度 500 kbps | m (ft.) | 100 (330) | 100 (330) | 100 (330) |
| MAC ID | 2 switches (address 00 - 63) or network programmable | 2 switches (address 00 - 63) or network programmable | 2 switches (address 00 - 63) or network programmable | |
| 數字功能 | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
| 技術規格 | DeviceNet? "Vacuum Gauge Device Profile" | DeviceNet? "Vacuum Gauge Device Profile" | DeviceNet? "Vacuum Gauge Device Profile" | |
| 設備類型 | ''CG'' for combination gauge | ''CG'' for combination gauge | ''CG'' for combination gauge | |
| I / O 從屬傳訊 | polling only | polling only | polling only | |
| DeviceNet? 的電源電壓 3PI6- / 3PI7- / 3PI8-0xx-xxxx | V (dc) | +15 … +30 | +15 … +30 | +15 … +30 |
| 功耗 3PI6- / 3PI7- / 3PI8-0xx-xxxx | W | ≤3 | ≤3 | ≤3 |
| DeviceNet 連接器 | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | Micro-Style, 5-pin, male | |
| Profibus DP | ||||
| 波特率 | kBaudMbaud | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 | 9.6 / 19.2 / 93.75 / 187.5 / 500 |
| 地址 | 2 switches (address 00 - 127) or network programmable | 2 switches (address 00 - 127) or network programmable | 2 switches (address 00 - 127) or network programmable | |
| 數字功能 | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
| Profibus DP 連接器 | D-Sub, 9-pin, female | D-Sub, 9-pin, female | D-Sub, 9-pin, female | |
| RS485C | ||||
| 波特率 | kBaud | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 | 9.6 / 19.2 / 38.4 /57.6 |
| 地址 | 2 switches (address 00 - 255) | 2 switches (address 00 - 255) | 2 switches (address 00 - 255) | |
| 數字功能 | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error | |
| RS485 連接器 | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | D-Sub, 15-pin HD, male | |
| EtherCAT | ||||
| 協議 EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
| 通訊標準 | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" | |
| 節點地址 | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
| 物理層 | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
| EtherCAT 連接器 | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
| 電纜 | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
| 電纜長度 | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
| 過程數據 | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
| (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
